Pulsed Closed Field Unbalanced Magnetron Sputtering (P-CFUBMS) Deposited TiC/a:C Thin Films: Fid-Bau Portal

Pulsed Closed Field Unbalanced Magnetron Sputtering (P-CFUBMS) Deposited TiC/a:C Thin Films

Lin, J.L. / Mishra, B. / Pinkas, M. / Moore, J.J.

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Pulsed Closed Field Unbalanced Magnetron Sputtering (P-CFUBMS) Deposited TiC/a:C Thin Films

Lin, J.L. / Mishra, B. / Pinkas, M. / Moore, J.J.

Pulsed Closed Field Unbalanced Magnetron Sputtering (P-CFUBMS) Deposited TiC/a:C Thin Films

Lin, J.L. / Mishra, B. / Pinkas, M. / Moore, J.J.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

Seitennavigation

Dokumentinformationen

Ähnliche Titel

Exportieren, teilen und zitieren

Dokumentinformationen

Titel:

Pulsed Closed Field Unbalanced Magnetron Sputtering (P-CFUBMS) Deposited TiC/a:C Thin Films

Beteiligte:

Lin, J.L. (Autor:in) / Mishra, B. (Autor:in) / Pinkas, M. (Autor:in) / Moore, J.J. (Autor:in) / Chang, Y.W. / Kim, N.J. / Lee, C.S.

Erschienen in:

PRICM 6: Selected, peer reviewed papers from The Sixth Pacific Rim International Conference on Advanced Materials and Processing, November 5-9, 2007, ICC Jeju, Jeju Island, Korea ; 1177-1180

MATERIALS SCIENCE FORUM ; 561/565

Erscheinungsdatum:

01.01.2007

Format / Umfang:

4 pages

ISSN:

0255-5476

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

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Synthesis and mechanical properties of amorphous carbon films by closed-field unbalanced magnetron sputtering

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