Kinetic Monte Carlo simulation of {111}-oriented SiC film with chemical vapor deposition

Liu, C. x. / Yang, Y. q. / Zhang, R. j. et al. | British Library Online Contents | 2008

A kinetic Monte Carlo simulation of film growth by physical vapor deposition on rotating substrates

Cho, J. / Terry, S. G. / LeSar, R. et al. | British Library Online Contents | 2005

A Monte Carlo simulation of silicon nitride thin film microstructure in ultraviolet localized-chemical vapor deposition

Flicstein, J. / Pata, S. / Le Solliec, J. M. et al. | British Library Online Contents | 1998

Grain-scale growth simulation of SiC film with the Chemical Vapor Deposition method

Liu, C. / Yang, Y. / Luo, X. | British Library Online Contents | 2012

Multi-length scale modeling of chemical vapor deposition of titanium nitride coatings

Grujicic, M. / Lai, S. G. | British Library Online Contents | 2001