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Multi-length scale Monte Carlo simulation of the growth process of SiC film by chemical vapor deposition

Liu, C. X. / Yang, Y. Q. / Luo, X. / Zhang, R. J. / Huang, B.

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Multi-length scale Monte Carlo simulation of the growth process of SiC film by chemical vapor deposition

Liu, C. X. / Yang, Y. Q. / Luo, X. / Zhang, R. J. / Huang, B.

Multi-length scale Monte Carlo simulation of the growth process of SiC film by chemical vapor deposition

Liu, C. X. / Yang, Y. Q. / Luo, X. / Zhang, R. J. / Huang, B.

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Order at Subito €

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Document information

Title:

Multi-length scale Monte Carlo simulation of the growth process of SiC film by chemical vapor deposition

Contributors:

Liu, C. X. (author) / Yang, Y. Q. (author) / Luo, X. (author) / Zhang, R. J. (author) / Huang, B. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 3342-3349

Publication date:

2008-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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