Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Elimination of surface scratch/texture on the surface of single crystal Si substrate in chemo-mechanical grinding (CMG) process
Elimination of surface scratch/texture on the surface of single crystal Si substrate in chemo-mechanical grinding (CMG) process
Elimination of surface scratch/texture on the surface of single crystal Si substrate in chemo-mechanical grinding (CMG) process
Tian, Y. B. (Autor:in) / Zhou, L. (Autor:in) / Shimizu, J. (Autor:in) / Tashiro, Y. (Autor:in) / Kang, R. K. (Autor:in)
APPLIED SURFACE SCIENCE ; 255 ; 4205-4211
01.01.2009
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
| British Library Online Contents | 2008
Effect of Wheel Additive On Chemo-Mechanical Grinding (CMG) of Single Crystal Si Wafer
| British Library Online Contents | 2010
Thermal effects on mechanical grinding-induced surface texture in tetragonal piezoelectrics
| British Library Online Contents | 2007
| British Library Online Contents | 2017
Mechanism of grinding wheel surface reproduction in regular surface texture generation
| British Library Online Contents | 2008