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    Elimination of surface scratch/texture on the surface of single crystal Si substrate in chemo-mechanical grinding (CMG) process

    New search for: Tian, Y. B.
    New search for: Zhou, L.
    New search for: Shimizu, J.
    New search for: Tashiro, Y.
    New search for: Kang, R. K.

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    Elimination of surface scratch/texture on the surface of single crystal Si substrate in chemo-mechanical grinding (CMG) process

    New search for: Tian, Y. B.
    New search for: Zhou, L.
    New search for: Shimizu, J.
    New search for: Tashiro, Y.
    New search for: Kang, R. K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Elimination of surface scratch/texture on the surface of single crystal Si substrate in chemo-mechanical grinding (CMG) process

    New search for: Tian, Y. B.
    New search for: Zhou, L.
    New search for: Shimizu, J.
    New search for: Tashiro, Y.
    New search for: Kang, R. K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Elimination of surface scratch/texture on the surface of single crystal Si substrate in chemo-mechanical grinding (CMG) process

    Contributors:

    Tian, Y. B. (author) / Zhou, L. (author) / Shimizu, J. (author) / Tashiro, Y. (author) / Kang, R. K. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 255 ; 4205-4211

    Publication date:

    2009-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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