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Nanoimprint Lithography on Silica Sol-Gels: A Simple Route to Sequential Patterning
Nanoimprint Lithography on Silica Sol-Gels: A Simple Route to Sequential Patterning
Nanoimprint Lithography on Silica Sol-Gels: A Simple Route to Sequential Patterning
Peroz, C. (Autor:in) / Chauveau, V. (Autor:in) / Barthel, E. (Autor:in) / Sondergard, E. (Autor:in)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 21 ; 555-558
01.01.2009
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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