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Structural and optical properties of silicon quantum dots in silicon nitride grown in situ by PECVD using different gas precursors
Structural and optical properties of silicon quantum dots in silicon nitride grown in situ by PECVD using different gas precursors
Structural and optical properties of silicon quantum dots in silicon nitride grown in situ by PECVD using different gas precursors
Mercaldo, L. V. (Autor:in) / Veneri, P. D. (Autor:in) / Esposito, E. (Autor:in) / Massera, E. (Autor:in) / Usatii, I. (Autor:in) / Privato, C. (Autor:in)
01.01.2009
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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