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Defects in 4H-SiC Layers Grown by Chloride-Based Epitaxy
Defects in 4H-SiC Layers Grown by Chloride-Based Epitaxy
Defects in 4H-SiC Layers Grown by Chloride-Based Epitaxy
Beyer, F.C. (Autor:in) / Pedersen, H. (Autor:in) / Henry, A. (Autor:in) / Janzen, E. (Autor:in)
MATERIALS SCIENCE FORUM ; 615/617 ; 373-376
01.01.2009
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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