Characterisation of nanocavities in He+-implanted silicon by transmission electron microscopy and small-angle X-ray scattering: Fid-Bau Portal

Characterisation of nanocavities in He+-implanted silicon by transmission electron microscopy and small-angle X-ray scattering

Dumont, M. / Coulet, M. V. / Bley, F. / Regula, G.

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Characterisation of nanocavities in He+-implanted silicon by transmission electron microscopy and small-angle X-ray scattering

Dumont, M. / Coulet, M. V. / Bley, F. / Regula, G.

Characterisation of nanocavities in He+-implanted silicon by transmission electron microscopy and small-angle X-ray scattering

Dumont, M. / Coulet, M. V. / Bley, F. / Regula, G.

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Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

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Dokumentinformationen

Titel:

Characterisation of nanocavities in He+-implanted silicon by transmission electron microscopy and small-angle X-ray scattering

Beteiligte:

Dumont, M. (Autor:in) / Coulet, M. V. (Autor:in) / Bley, F. (Autor:in) / Regula, G. (Autor:in)

Erschienen in:

MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 162 ; 135-142

Erscheinungsdatum:

01.01.2009

Format / Umfang:

8 pages

ISSN:

0921-5107

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

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