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    Characterisation of nanocavities in He+-implanted silicon by transmission electron microscopy and small-angle X-ray scattering

    New search for: Dumont, M.
    New search for: Coulet, M. V.
    New search for: Bley, F.
    New search for: Regula, G.

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    Characterisation of nanocavities in He+-implanted silicon by transmission electron microscopy and small-angle X-ray scattering

    New search for: Dumont, M.
    New search for: Coulet, M. V.
    New search for: Bley, F.
    New search for: Regula, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterisation of nanocavities in He+-implanted silicon by transmission electron microscopy and small-angle X-ray scattering

    New search for: Dumont, M.
    New search for: Coulet, M. V.
    New search for: Bley, F.
    New search for: Regula, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Characterisation of nanocavities in He+-implanted silicon by transmission electron microscopy and small-angle X-ray scattering

    Contributors:

    Dumont, M. (author) / Coulet, M. V. (author) / Bley, F. (author) / Regula, G. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 162 ; 135-142

    Publication date:

    2009-01-01

    Size:

    8 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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