Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Improved determination of phosphorus contamination during ion implantation by SRP and simulations
Improved determination of phosphorus contamination during ion implantation by SRP and simulations
Improved determination of phosphorus contamination during ion implantation by SRP and simulations
Kuruc, M. (Autor:in) / Hulenyi, L. (Autor:in) / Kinder, R. (Autor:in)
APPLIED SURFACE SCIENCE ; 255 ; 8110-8114
01.01.2009
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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