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Atomic Layer Deposition of Dielectrics on Ge and III-V Materials for Ultrahigh Performance Transistors
Atomic Layer Deposition of Dielectrics on Ge and III-V Materials for Ultrahigh Performance Transistors
Atomic Layer Deposition of Dielectrics on Ge and III-V Materials for Ultrahigh Performance Transistors
Wallace, R.M. (Autor:in) / McIntyre, P.C. (Autor:in) / Kim, J. (Autor:in) / Nishi, Y. (Autor:in)
MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 34 ; 493-503
01.01.2009
11 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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