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Atomic layer deposition of sub-10 nm high-K gate dielectrics on top-gated MoS2 transistors without surface functionalization
Atomic layer deposition of sub-10 nm high-K gate dielectrics on top-gated MoS2 transistors without surface functionalization
Atomic layer deposition of sub-10 nm high-K gate dielectrics on top-gated MoS2 transistors without surface functionalization
Lin, Yu-Shu (Autor:in) / Cheng, Po-Hsien (Autor:in) / Huang, Kuei-Wen (Autor:in) / Lin, Hsin-Chih (Autor:in) / Chen, Miin-Jang (Autor:in)
Applied surface science ; 443 ; 421-428
01.01.2018
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.44
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