Photo-induced deposition and characterization of variable bandgap a-SiN:H alloy films

Banerji, N. / Serra, J. / Chiussi, S. et al. | British Library Online Contents | 2000

Optical characterization of ns-SiN:H in the infrared by spectroscopic ellipsometry

Sancho-Parramon, J. / Bosch, S. / Canillas, A. | British Library Online Contents | 2006

Investigation of local order of a-SiN:H films deposited by hot wire chemical vapour deposition (HWCVD)

Swain, B. P. / Swain, B. S. / Hwang, N. M. | British Library Online Contents | 2008

Effect of substrate bias on b-SiC films prepared by PECVD

Wang, B. / Liu, W. / Wang, G. J. et al. | British Library Online Contents | 2003

Effect of substrate bias and temperature on magnetron sputtered CrSiN films

Tan, S. / Zhang, X. / Wu, X. et al. | British Library Online Contents | 2011