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Optical characterization of ns-SiN:H in the infrared by spectroscopic ellipsometry
Optical characterization of ns-SiN:H in the infrared by spectroscopic ellipsometry
Optical characterization of ns-SiN:H in the infrared by spectroscopic ellipsometry
Sancho-Parramon, J. (Autor:in) / Bosch, S. (Autor:in) / Canillas, A. (Autor:in)
APPLIED SURFACE SCIENCE ; 253 ; 65-69
01.01.2006
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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