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X-ray photoelectron spectroscopy study of NiSi formation on shallow junctions
X-ray photoelectron spectroscopy study of NiSi formation on shallow junctions
X-ray photoelectron spectroscopy study of NiSi formation on shallow junctions
Jiang, Y. L. (Autor:in) / Ru, G. P. (Autor:in) / Qu, X. P. (Autor:in) / Li, B. Z. (Autor:in)
APPLIED SURFACE SCIENCE ; 256 ; 698-701
01.01.2009
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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