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Preferential Orientation Growth of AlN Thin Films on Si(111) Substrates by Plasma-Assisted Molecular Beam Epitaxy
Preferential Orientation Growth of AlN Thin Films on Si(111) Substrates by Plasma-Assisted Molecular Beam Epitaxy
Preferential Orientation Growth of AlN Thin Films on Si(111) Substrates by Plasma-Assisted Molecular Beam Epitaxy
Chuah, L.S. ( Autor:in ) / Hassan, Z. ( Autor:in ) / Hassan, H.A. ( Autor:in )
SURFACE REVIEW AND LETTERS ; 16 ; 925-928
01.01.2009
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
530.417
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