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On the influence of the surface roughness onto the ultrathin SiO2/Si structure properties
On the influence of the surface roughness onto the ultrathin SiO2/Si structure properties
On the influence of the surface roughness onto the ultrathin SiO2/Si structure properties
Jureka, S. (Autor:in) / Kobayashi, H. (Autor:in) / Takahashi, M. (Autor:in) / Matsumoto, T. (Autor:in) / Jurekova, M. (Autor:in) / Chovanec, F. (Autor:in) / Pinik, E. (Autor:in)
APPLIED SURFACE SCIENCE ; 256 ; 5623-5628
01.01.2010
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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