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On the influence of the surface roughness onto the ultrathin SiO2/Si structure properties
On the influence of the surface roughness onto the ultrathin SiO2/Si structure properties
On the influence of the surface roughness onto the ultrathin SiO2/Si structure properties
Jureka, S. (author) / Kobayashi, H. (author) / Takahashi, M. (author) / Matsumoto, T. (author) / Jurekova, M. (author) / Chovanec, F. (author) / Pinik, E. (author)
APPLIED SURFACE SCIENCE ; 256 ; 5623-5628
2010-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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