Deposition of PTFE thin films by RF plasma sputtering on 100 silicon substrates

Bodas, D. S. / Mandale, A. B. / Gangal, S. A. | British Library Online Contents | 2005

Correlation study of structural, optical and electrical properties of amorphous carbon thin films prepared by ion beam sputtering deposition technique

Mohagheghpour, E. / Rajabi, M. / Gholamipour, R. et al. | British Library Online Contents | 2016

Optical emission spectroscopy investigation of sputtering discharge used for SiOxNy thin films deposition and correlation with the film composition

Rebib, F. / Tomasella, E. / Thomas, L. et al. | British Library Online Contents | 2006

Optical emission spectroscopy during fabrication of indium-tin-oxynitride films by RF-sputtering

Koufaki, M. / Sifakis, M. / Iliopoulos, E. et al. | British Library Online Contents | 2006

Structural, optical and electrical properties of amorphous silicon thin films prepared by sputtering with different targets

Qin, Y. / Feng, T. / Li, Z. et al. | British Library Online Contents | 2011