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Optical emission spectroscopy during fabrication of indium-tin-oxynitride films by RF-sputtering
Optical emission spectroscopy during fabrication of indium-tin-oxynitride films by RF-sputtering
Optical emission spectroscopy during fabrication of indium-tin-oxynitride films by RF-sputtering
Koufaki, M. (Autor:in) / Sifakis, M. (Autor:in) / Iliopoulos, E. (Autor:in) / Pelekanos, N. (Autor:in) / Modreanu, M. (Autor:in) / Cimalla, V. (Autor:in) / Ecke, G. (Autor:in) / Aperathitis, E. (Autor:in)
APPLIED SURFACE SCIENCE ; 253 ; 405-408
01.01.2006
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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