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    Plasma optical emission spectroscopy diagnostic during amorphous silicon thin films deposition by Rf sputtering technique

    New search for: Benchiheb, N.
    New search for: Aida, M. S.
    New search for: Attaf, N.

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    Plasma optical emission spectroscopy diagnostic during amorphous silicon thin films deposition by Rf sputtering technique

    New search for: Benchiheb, N.
    New search for: Aida, M. S.
    New search for: Attaf, N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Plasma optical emission spectroscopy diagnostic during amorphous silicon thin films deposition by Rf sputtering technique

    New search for: Benchiheb, N.
    New search for: Aida, M. S.
    New search for: Attaf, N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Plasma optical emission spectroscopy diagnostic during amorphous silicon thin films deposition by Rf sputtering technique

    Contributors:

    Benchiheb, N. (author) / Aida, M. S. (author) / Attaf, N. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 172 ; 191-195

    Publication date:

    2010-01-01

    Size:

    5 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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