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Two routes to polycrystalline CoSi2 thin films by co-sputtering Co and Si
Two routes to polycrystalline CoSi2 thin films by co-sputtering Co and Si
Two routes to polycrystalline CoSi2 thin films by co-sputtering Co and Si
Tsuji, Y. (Autor:in) / Nakamura, S. (Autor:in) / Noda, S. (Autor:in)
APPLIED SURFACE SCIENCE ; 256 ; 7118-7124
01.01.2010
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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