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Two routes to polycrystalline CoSi2 thin films by co-sputtering Co and Si

Tsuji, Y. / Nakamura, S. / Noda, S.

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Two routes to polycrystalline CoSi2 thin films by co-sputtering Co and Si

Tsuji, Y. / Nakamura, S. / Noda, S.

Two routes to polycrystalline CoSi2 thin films by co-sputtering Co and Si

Tsuji, Y. / Nakamura, S. / Noda, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Two routes to polycrystalline CoSi2 thin films by co-sputtering Co and Si

Contributors:

Tsuji, Y. (author) / Nakamura, S. (author) / Noda, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 256 ; 7118-7124

Publication date:

2010-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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