Effects of mixed abrasives in chemical mechanical polishing of oxide films

Lu, Z. / Lee, S.-H. / Gorantla, V. R. K. et al. | British Library Online Contents | 2003

Chemical mechanical polishing of thermal oxide films using silica particles coated with ceria

Lee, S.-H. / Lu, Z. / Babu, S. V. et al. | British Library Online Contents | 2002

Chemical mechanical glass polishing with cerium oxide: Effect of selected physico-chemical characteristics on polishing efficiency

Janoš, P. / Ederer, J. / Pilařová, V. r. et al. | British Library Online Contents | 2016

Modeling of Polishing Pad Wear in Chemical Mechanical Polishing

Li, M. / Zhu, Y.W. / Li, J. et al. | British Library Online Contents | 2010

Effect of Pre-Thin-Surface Grinding on Copper Chemical Mechanical Polishing

Watanabe, J. / Hisamatsu, T. / Hirano, M. | British Library Online Contents | 2004