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Etch Pits on 4H-SiC Surface Produced by ClF~3 Gas
Etch Pits on 4H-SiC Surface Produced by ClF~3 Gas
Etch Pits on 4H-SiC Surface Produced by ClF~3 Gas
Habuka, H. (Autor:in) / Furukawa, K. (Autor:in) / Tanaka, K. (Autor:in) / Katsumi, Y. (Autor:in) / Iizuka, S. (Autor:in) / Fukae, K. (Autor:in) / Kato, T. (Autor:in) / Monakhov, E.V. / Hornos, T. / Svensson, B.G.
01.01.2011
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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