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Etch Pits on 4H-SiC Surface Produced by ClF~3 Gas
Etch Pits on 4H-SiC Surface Produced by ClF~3 Gas
Etch Pits on 4H-SiC Surface Produced by ClF~3 Gas
Habuka, H. (author) / Furukawa, K. (author) / Tanaka, K. (author) / Katsumi, Y. (author) / Iizuka, S. (author) / Fukae, K. (author) / Kato, T. (author) / Monakhov, E.V. / Hornos, T. / Svensson, B.G.
2011-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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