Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Density and Behavior of Etch Pits on C-Face 4H-SiC Surface Produced by ClF~3 Gas
Density and Behavior of Etch Pits on C-Face 4H-SiC Surface Produced by ClF~3 Gas
Density and Behavior of Etch Pits on C-Face 4H-SiC Surface Produced by ClF~3 Gas
Habuka, H. (Autor:in) / Furukawa, K. (Autor:in) / Kanai, T. (Autor:in) / Kato, T. (Autor:in)
MATERIALS SCIENCE FORUM ; 717/720 ; 379-382
01.01.2012
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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