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The Range Distribution of Er Ions Implanted in Silicon Crystal
The Range Distribution of Er Ions Implanted in Silicon Crystal
The Range Distribution of Er Ions Implanted in Silicon Crystal
Qin, X.F. (Autor:in) / Liang, Y. (Autor:in) / Wang, F.X. (Autor:in) / Zhu, G.
Advanced Materials and Computer Science ; 178-182
KEY ENGINEERING MATERIALS ; 474/476
01.01.2011
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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