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Investigation of the Range Distribution of Yb Ions Implanted in SOI
Investigation of the Range Distribution of Yb Ions Implanted in SOI
Investigation of the Range Distribution of Yb Ions Implanted in SOI
Qin, X.F. (Autor:in) / Ma, G.J. (Autor:in) / Shi, S.H. (Autor:in) / Fu, G. (Autor:in) / Liu, H. W.
International conference; 1st, Advanced engineering materials and architecture science; Materials science, civil engineering and architecture science, mechanical engineering and manufacturing technology: (ICAEMAS 2014) ; 2014 ; Xi'an, China
01.01.2014
4 pages
Includes bibliographical references and indexes.
Aufsatz (Konferenz)
Englisch
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