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Influence of Technique Parameters on Depositing Rate of SmCo Films Prepared by Magnetron Sputtering
Influence of Technique Parameters on Depositing Rate of SmCo Films Prepared by Magnetron Sputtering
Influence of Technique Parameters on Depositing Rate of SmCo Films Prepared by Magnetron Sputtering
Liu, J.-y. (Autor:in) / Ma, S.-n. (Autor:in) / Sun, X.-f. (Autor:in) / Li, X. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -HANGZHOU- ; 29 ; 411-414
01.01.2011
4 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
620.11
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