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Structure and Mechanical Properties of AlCrN Thin Films Deposited by Magnetron Sputtering
Structure and Mechanical Properties of AlCrN Thin Films Deposited by Magnetron Sputtering
Structure and Mechanical Properties of AlCrN Thin Films Deposited by Magnetron Sputtering
Pham, T.T.H. (Autor:in) / Le Bourhis, E. (Autor:in) / Goudeau, P. (Autor:in) / Guerin, P. (Autor:in)
MATERIALS SCIENCE FORUM ; 695 ; 182-185
01.01.2011
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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