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Structure and Mechanical Properties of AlCrN Thin Films Deposited by Magnetron Sputtering
Structure and Mechanical Properties of AlCrN Thin Films Deposited by Magnetron Sputtering
Structure and Mechanical Properties of AlCrN Thin Films Deposited by Magnetron Sputtering
Pham, T.T.H. (author) / Le Bourhis, E. (author) / Goudeau, P. (author) / Guerin, P. (author)
MATERIALS SCIENCE FORUM ; 695 ; 182-185
2011-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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