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Investigation of Basal Plane Dislocations in the 4H-SiC Epilayers Grown on {0001} Substrates
Investigation of Basal Plane Dislocations in the 4H-SiC Epilayers Grown on {0001} Substrates
Investigation of Basal Plane Dislocations in the 4H-SiC Epilayers Grown on {0001} Substrates
Tsuchida, H. (Autor:in) / Miyanagi, T. (Autor:in) / Kamata, I. (Autor:in) / Nakamura, T. (Autor:in) / Izumi, K. (Autor:in) / Nakayama, K. (Autor:in) / Ishii, R. (Autor:in) / Asano, K. (Autor:in) / Sugawara, Y. (Autor:in) / Nipoti, R.
01.01.2005
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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