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Study of plasma immersion ion implantation into silicon substrate using magnetic mirror geometry
Study of plasma immersion ion implantation into silicon substrate using magnetic mirror geometry
Study of plasma immersion ion implantation into silicon substrate using magnetic mirror geometry
Pillaca, E. J. (Autor:in) / Ueda, M. (Autor:in) / Kostov, K. G. (Autor:in) / Reuther, H. (Autor:in)
APPLIED SURFACE SCIENCE ; 258 ; 9564-9569
01.01.2012
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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