Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Laser-induced front side and back side etching of fused silica with KrF and XeF excimer lasers using metallic absorber layers: A comparison
Laser-induced front side and back side etching of fused silica with KrF and XeF excimer lasers using metallic absorber layers: A comparison
Laser-induced front side and back side etching of fused silica with KrF and XeF excimer lasers using metallic absorber layers: A comparison
Lorenz, P. (Autor:in) / Ehrhardt, M. (Autor:in) / Zimmer, K. (Autor:in)
APPLIED SURFACE SCIENCE ; 258 ; 9742-9746
01.01.2012
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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