Laser-induced front side etching of fused silica with XeF excimer laser using thin metal layers

Lorenz, P. / Ehrhardt, M. / Wehrmann, A. et al. | British Library Online Contents | 2012

Excimer Laser Etching

Boatner, L. / Longmire, H. / Rouleau, C. et al. | British Library Online Contents | 2008

Excimer-laser induced chemical etching of transition metals

O`Driscoll, C. / Winfield, R. / Khalfi, K. et al. | British Library Online Contents | 2000

Laser-induced front side and back side etching of fused silica with KrF and XeF excimer lasers using metallic absorber layers: A comparison

Lorenz, P. / Ehrhardt, M. / Zimmer, K. | British Library Online Contents | 2012

Excimer laser induced chlorine etching of Si patterns for microelectronics

Baumgaertner, H. / Jiang, W. / Eisele, I. | British Library Online Contents | 1996