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Selective epitaxial growth of Si1−xGex films via the alternating gas supply of Si2H6, GeH4, and Cl2: Effects of Cl2 exposure
Selective epitaxial growth of Si1−xGex films via the alternating gas supply of Si2H6, GeH4, and Cl2: Effects of Cl2 exposure
Selective epitaxial growth of Si1−xGex films via the alternating gas supply of Si2H6, GeH4, and Cl2: Effects of Cl2 exposure
Park, S. J. (Autor:in) / Baik, S. (Autor:in) / Kim, H. (Autor:in)
MATERIALS LETTERS ; 88 ; 89-92
01.01.2012
4 pages
Aufsatz (Zeitschrift)
Englisch
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