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Selective epitaxial growth of Si1−xGex films via the alternating gas supply of Si2H6, GeH4, and Cl2: Effects of Cl2 exposure
Selective epitaxial growth of Si1−xGex films via the alternating gas supply of Si2H6, GeH4, and Cl2: Effects of Cl2 exposure
Selective epitaxial growth of Si1−xGex films via the alternating gas supply of Si2H6, GeH4, and Cl2: Effects of Cl2 exposure
Park, S. J. (author) / Baik, S. (author) / Kim, H. (author)
MATERIALS LETTERS ; 88 ; 89-92
2012-01-01
4 pages
Article (Journal)
English
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