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Near surface layer evolution in Zn^+ ions implanted Si upon annealing treatments
Near surface layer evolution in Zn^+ ions implanted Si upon annealing treatments
Near surface layer evolution in Zn^+ ions implanted Si upon annealing treatments
Saraykin, V. V. (Autor:in) / Shcherbachev, K. D. (Autor:in) / Petrov, D. V. (Autor:in) / Privezentsev, V. V. (Autor:in)
APPLIED SURFACE SCIENCE ; 267 ; 97-100
01.01.2013
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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