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    Near surface layer evolution in Zn^+ ions implanted Si upon annealing treatments

    New search for: Saraykin, V. V.
    New search for: Shcherbachev, K. D.
    New search for: Petrov, D. V.
    New search for: Privezentsev, V. V.

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    Near surface layer evolution in Zn^+ ions implanted Si upon annealing treatments

    New search for: Saraykin, V. V.
    New search for: Shcherbachev, K. D.
    New search for: Petrov, D. V.
    New search for: Privezentsev, V. V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Near surface layer evolution in Zn^+ ions implanted Si upon annealing treatments

    New search for: Saraykin, V. V.
    New search for: Shcherbachev, K. D.
    New search for: Petrov, D. V.
    New search for: Privezentsev, V. V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Near surface layer evolution in Zn^+ ions implanted Si upon annealing treatments

    Contributors:

    Saraykin, V. V. (author) / Shcherbachev, K. D. (author) / Petrov, D. V. (author) / Privezentsev, V. V. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 267 ; 97-100

    Publication date:

    2013-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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