Improved Stability of 4H-SiC MOS Device Properties by Combination of NO and POCl~3 Annealing: Fid-Bau Portal

Improved Stability of 4H-SiC MOS Device Properties by Combination of NO and POCl~3 Annealing

Yano, H. / Araoka, T. / Hatayama, T. / Fuyuki, T.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

Seitennavigation

Dokumentinformationen

Ähnliche Titel

Exportieren, teilen und zitieren

Improved Stability of 4H-SiC MOS Device Properties by Combination of NO and POCl~3 Annealing

Yano, H. / Araoka, T. / Hatayama, T. / Fuyuki, T.

Improved Stability of 4H-SiC MOS Device Properties by Combination of NO and POCl~3 Annealing

Yano, H. / Araoka, T. / Hatayama, T. / Fuyuki, T.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

Seitennavigation

Dokumentinformationen

Ähnliche Titel

Exportieren, teilen und zitieren

Dokumentinformationen

Titel:

Improved Stability of 4H-SiC MOS Device Properties by Combination of NO and POCl~3 Annealing

Beteiligte:

Yano, H. (Autor:in) / Araoka, T. (Autor:in) / Hatayama, T. (Autor:in) / Fuyuki, T. (Autor:in) / Lebedev, A.A. / Davydov, S.Y. / Ivanov, P.A. / Levinshtein, M.E.

Erschienen in:

Silicon Carbide and Related Materials 2012 Selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6, 2012, St. Petersburg, Russian Federation ; 727-732

MATERIALS SCIENCE FORUM ; 740/742

Erscheinungsdatum:

01.01.2013

Format / Umfang:

6 pages

ISSN:

0255-5476

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

Kotake, S. / Yano, H. / Okamoto, D. et al. | British Library Online Contents | 2011

Effect of POCl~3 Annealing on Reliability of Thermal Oxides Grown on 4H-SiC

Morishita, R. / Yano, H. / Okamoto, D. et al. | British Library Online Contents | 2012

Characterization of POCl~3-Annealed 4H-Sic Mosfets by Charge Pumping Technique

Osawa, A. / Yano, H. / Hatayama, T. et al. | British Library Online Contents | 2013

Characterization of SiO~2/SiC Interfaces Annealed in N~2O or POCl~3

Fiorenza, P. / Swanson, L.K. / Vivona, M. et al. | British Library Online Contents | 2014

Improvement of Mechanical Properties of 7475 Aluminium Alloy by the Combination of SPD Processing and Annealing

Wawer, K. / Lewandowska, M. / Kurzydlowski, K.J. | British Library Online Contents | 2011

Nach oben