Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Effect of an in situ hydrogen plasma pre-treatment on the reduction of GaSb native oxides prior to atomic layer deposition
Effect of an in situ hydrogen plasma pre-treatment on the reduction of GaSb native oxides prior to atomic layer deposition
Effect of an in situ hydrogen plasma pre-treatment on the reduction of GaSb native oxides prior to atomic layer deposition
Cleveland, E. R. (Autor:in) / Ruppalt, L. B. (Autor:in) / Bennett, B. R. (Autor:in) / Prokes, S. M. (Autor:in)
APPLIED SURFACE SCIENCE ; 277 ; 167-175
01.01.2013
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Aspects of native oxides etching on n-GaSb(100) surface
British Library Online Contents | 2016
|Atomic layer deposition of ZnO transparent conducting oxides
British Library Online Contents | 1997
|Atomic Layer Deposition of Metal Oxides and Chalcogenides for High Performance Transistors
Wiley | 2022
|