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Effect of an in situ hydrogen plasma pre-treatment on the reduction of GaSb native oxides prior to atomic layer deposition
Effect of an in situ hydrogen plasma pre-treatment on the reduction of GaSb native oxides prior to atomic layer deposition
Effect of an in situ hydrogen plasma pre-treatment on the reduction of GaSb native oxides prior to atomic layer deposition
Cleveland, E. R. (author) / Ruppalt, L. B. (author) / Bennett, B. R. (author) / Prokes, S. M. (author)
APPLIED SURFACE SCIENCE ; 277 ; 167-175
2013-01-01
9 pages
Article (Journal)
English
DDC:
621.35
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