Source/drain engineering for MOSFETs with embedded-Si:C technology

Itokawa, H. / Yasutake, N. / Kusunoki, N. et al. | British Library Online Contents | 2008

Short channel effect improved strained-Si:C-source/drain PMOSFETs

Lee, M. H. / Chang, S. T. / Maikap, S. et al. | British Library Online Contents | 2008

Characterization of crystalline-amorphous transition by heavy C doping of poly-Si (poly-Si:C)

Yamamoto, Y. / Fursenko, O. / Kopke, K. et al. | British Library Online Contents | 2001

The Effect of Si:C Source Ratio on SiO~2/SiC Interface State Density for Nitrogen Doped 4H and 6H-SiC

Chung, G. Y. / Tin, C. C. / Won, J. H. et al. | British Library Online Contents | 2000

Epitaxy of Nanostructures

Ščukin, Vitalij A. | TIBKAT | 2004