Hafnium silicon oxide films prepared by atomic layer deposition

Kukli, K. / Ritala, M. / Leskela, M. et al. | British Library Online Contents | 2004

Etching of zirconium oxide, hafnium oxide, and hafnium silicates in dilute hydrofluoric acid solutions

Lowalekar, V. / Raghavan, S. | British Library Online Contents | 2004

Characteristics of hafnium oxide grown on silicon by atomic-layer deposition using tetrakis(ethylmethylamino)hafnium and water vapor as precursors

Chiou, Y.-K. / Chang, C.-H. / Wu, T.-B. | British Library Online Contents | 2007

Oxidation of Hafnium Diboride

Metcalfe, A. / Elsner, N. / Allan, D. et al. | British Library Conference Proceedings | 2000

Atomic layer deposition of hafnium and zirconium silicate thin films

Vainonen-Ahlgren, E. / Tois, E. / Ahlgren, T. et al. | British Library Online Contents | 2003