Characterizations of NbAlO thin films grown by atomic layer deposition

Liu, J. / Xu, Y. / Sun, Q. et al. | British Library Online Contents | 2011

Effects of post-deposition rapid thermal annealing on aluminum-doped ZnO thin films grown by atomic layer deposition

Cheng, Y. C. | British Library Online Contents | 2011

Effect of nitrogen doping concentration on the properties of TiO2 films grown by atomic layer deposition

Cheng, H. E. / Chen, Y. R. / Wu, W. T. et al. | British Library Online Contents | 2011

AFM studies of polycrystalline calcium sulfide thin films grown by atomic layer deposition

Dey, S. / Yun, S.J. | British Library Online Contents | 1999

SnO2 thin films grown by atomic layer deposition using a novel Sn precursor

Choi, M. J. / Cho, C. J. / Kim, K. C. et al. | British Library Online Contents | 2014