Improved efficiency of aluminum doping in ZnO thin films grown by atomic layer deposition: Fid-Bau Portal

Improved efficiency of aluminum doping in ZnO thin films grown by atomic layer deposition

Park, H. K. / Heo, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Improved efficiency of aluminum doping in ZnO thin films grown by atomic layer deposition

Park, H. K. / Heo, J.

Improved efficiency of aluminum doping in ZnO thin films grown by atomic layer deposition

Park, H. K. / Heo, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Improved efficiency of aluminum doping in ZnO thin films grown by atomic layer deposition

Contributors:

Park, H. K. (author) / Heo, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 309 ; 133-137

Publication date:

2014-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Liu, J. / Xu, Y. / Sun, Q. et al. | British Library Online Contents | 2011

Effects of post-deposition rapid thermal annealing on aluminum-doped ZnO thin films grown by atomic layer deposition

Cheng, Y. C. | British Library Online Contents | 2011

Effect of nitrogen doping concentration on the properties of TiO2 films grown by atomic layer deposition

Cheng, H. E. / Chen, Y. R. / Wu, W. T. et al. | British Library Online Contents | 2011

AFM studies of polycrystalline calcium sulfide thin films grown by atomic layer deposition

Dey, S. / Yun, S.J. | British Library Online Contents | 1999

SnO2 thin films grown by atomic layer deposition using a novel Sn precursor

Choi, M. J. / Cho, C. J. / Kim, K. C. et al. | British Library Online Contents | 2014