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Study on morphology of high-aspect-ratio grooves fabricated by using femtosecond laser irradiation and wet etching
Study on morphology of high-aspect-ratio grooves fabricated by using femtosecond laser irradiation and wet etching
Study on morphology of high-aspect-ratio grooves fabricated by using femtosecond laser irradiation and wet etching
APPLIED SURFACE SCIENCE ; 325 ; 145-150
01.01.2015
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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