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    Study on morphology of high-aspect-ratio grooves fabricated by using femtosecond laser irradiation and wet etching

    New search for: Chen, T.
    New search for: Pan, A.
    New search for: Li, C.
    New search for: Si, J.
    New search for: Hou, X.

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    Study on morphology of high-aspect-ratio grooves fabricated by using femtosecond laser irradiation and wet etching

    New search for: Chen, T.
    New search for: Pan, A.
    New search for: Li, C.
    New search for: Si, J.
    New search for: Hou, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Study on morphology of high-aspect-ratio grooves fabricated by using femtosecond laser irradiation and wet etching

    New search for: Chen, T.
    New search for: Pan, A.
    New search for: Li, C.
    New search for: Si, J.
    New search for: Hou, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Study on morphology of high-aspect-ratio grooves fabricated by using femtosecond laser irradiation and wet etching

    Contributors:

    Chen, T. (author) / Pan, A. (author) / Li, C. (author) / Si, J. (author) / Hou, X. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 325 ; 145-150

    Publication date:

    2015-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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